To investigate the effect of hydrophobic surface on cavitation damage, hydrogen-terminated diamond film and oxygen-terminated diamond film are prepared for the cavitation damage experiment. Because the film surfaces have the same roughness and hardness, the hydrophobic property effect is focused on. Obvious damage pits appear on the hydrogen-terminated surface after 4 h cavitation experiment, while no such pits are found on oxygen-terminated surface. Surface testing results also show that the surface roughness of hydrogen-terminated surface is higher than that of oxygen-terminated surface after the experiment. Such results indicate that the collapse of bubbles growing from the hydrophobic wall to be damaged plays important role in the generation of cavitation damage. 掃描探針顯微鏡(SPM/AFM/STM)