In cavitation erosion, stresswaves will be generated and propagated in the solid when a collapse impingement is acted on it. The cavitation damages on the solid surface are considered to be under the effect of the stresswaves. An ultrasonic vibration cavitation erosion experimentwas performed on a polished steel specimen, and not only the plastic deformations but also the brittle fractures appeared on the surface at the incubation stage of cavitation erosion. Some characteristics such as the hemispherical shape of the crater, intergranular fractures and subsurface comminution make the damages distinguishable from the common plastics deformations, and they are thought to be the results of shear waves. Thus, stress waves are proved to take part in the cavitation erosion, and they bring some special damage styles depending on the conditions of the impaction and mechanical properties of the specimen. 掃描探針顯微鏡(SPM/AFM/STM)