This example shows that PP-TOFMS is a fast and reliable technique for depth profi領(lǐng) of rare earth doped ZnO thin films. Tb and Eu prof les are obtained with high sensitivity and high depth resolution. This type of information is typically provided by SIMS, RBS or depth profi領(lǐng) XPS but not as rapidly and readily and at a higher cost. Such profiles turn out to be powerful complementary information to understand photoluminescence data. HORIBA等離子體分析飛行時間質(zhì)譜儀PP-TOFMS