近年來,人們在不斷探索新型低能耗,高存儲密度的新型磁存儲材料。特別是對于磁疇壁動力學(xué)、斯格明子等方面的研究吸引了大批科研人員的目光。隨著研究的深入,制備出具有特定磁各項異性的材料并且進(jìn)行精細(xì)的調(diào)控變的尤為重要。在對樣品特性精細(xì)調(diào)控的技術(shù)中,利用氦離子輻照是對樣品無損壞的一種高精度手段。氦離子輻照具有精度高、均勻性好、條件更加靈活、易于控制等優(yōu)勢,與其它改性方法相比,有利于器件或集成電路的大規(guī)模生產(chǎn)?;诖?,法國Spin-Ion 公司經(jīng)多年研發(fā)推出離子輻照磁性精細(xì)調(diào)控系統(tǒng)Helium-S?。該系統(tǒng)采用創(chuàng)新的離子束技術(shù),可以通過超緊湊和快速的氦離子束設(shè)備精確控制原子間的位移,使其能夠在原子尺度上加工材料,并通過離子束工藝來調(diào)控薄膜和異質(zhì)結(jié)構(gòu)。設(shè)備一經(jīng)推出,便受到廣大科學(xué)家的關(guān)注,截止目前已有20多家科研和工業(yè)用戶以及合作伙伴使用該技術(shù),國內(nèi)也在北航和復(fù)旦等高校安裝該系統(tǒng),其獨有的技術(shù)正受到來自相關(guān)科研圈和工業(yè)領(lǐng)域越來越多的認(rèn)可。
近期,來自于法國格勒諾布爾-阿爾卑斯大學(xué)CNRS-Institut Néel實驗室的Stefania Pizzini團(tuán)隊聯(lián)合法國Spin-Ion Technologies公司的兩名工程師利用離子輻照磁性精細(xì)調(diào)控系統(tǒng)Helium-S?對Pt/Co/AlOx磁性薄膜進(jìn)行了磁性調(diào)控研究。文章以“Improving Néel Domain Walls Dynamics and Skyrmion Stability Using He Ion Irradiation”為題發(fā)表在Small上。
氦離子輻照量對樣品的磁各向異性的影響
文章討論了使用離子輻照磁性精細(xì)調(diào)控系統(tǒng)Helium-S?對Pt/Co/AlOx三層膜的磁性能產(chǎn)生的影響。研究人員發(fā)現(xiàn),氦離子輻照可以改善Néel磁疇壁的動力學(xué)和斯格明子的穩(wěn)定性。輻照可以降低垂直磁各向異性(PMA),而不影響界面Dzyaloshinskii-Moriya相互作用(DMI)的強(qiáng)度。這使得磁疇壁可以在較低的磁場下達(dá)到更大的速度。該研究表明,將PMA與DMI分離對于基于磁疇壁動力學(xué)的低能耗設(shè)備的設(shè)計是有益的。同時,輻照還可以調(diào)節(jié)斯格明子的大小和穩(wěn)定性,使其更加穩(wěn)定并且可以在更高的磁場下存在。這些結(jié)果表明氦離子輻照可以對基于磁疇壁動力學(xué)和斯格明子的低能耗設(shè)備的設(shè)計產(chǎn)生積極影響。
氦離子輻照量對樣品的磁疇壁和斯格明子的影響
該項工作中使用的離子輻照磁性精細(xì)調(diào)控系統(tǒng)Helium-S?已經(jīng)成為磁性薄膜研究與性能調(diào)控的重要手段。該系統(tǒng)可以對直徑1英寸的晶圓進(jìn)行掃描輻照,具有精度高,可控性好等特點。
應(yīng)用領(lǐng)域:
? 磁性隨機(jī)存儲器(MRAM):自旋轉(zhuǎn)移矩磁性隨機(jī)存儲(STT-MRAM),自旋軌道矩磁性隨機(jī)存儲(SOT-MRAM),磁疇壁磁性隨機(jī)存儲(DW-MRAM)等;
? 自旋電子學(xué):斯格明子,磁性隧道結(jié),磁傳感器等;
? 磁學(xué)相關(guān):磁性氧化物,多鐵性材料;
? 其他方向:薄膜改性,芯片加工,仿神經(jīng)器件,邏輯器件等。
產(chǎn)品特點:
? 可通過超緊湊和快速的氦離子束設(shè)備精確控制原子間的位移,通過氦離子輻照可精確調(diào)控磁性薄膜或晶圓的磁學(xué)性質(zhì)。
? 可提供能量范圍:1-30 keV的He+離子束
? 采用創(chuàng)新的電子回旋共振(ECR)離子源
? 可對25 mm的試樣進(jìn)行快速的均勻輻照(幾分鐘)
? 超緊湊的設(shè)計,節(jié)省實驗空間
? 可與現(xiàn)有的超高真空設(shè)備互聯(lián)
離子輻照磁性精細(xì)調(diào)控系統(tǒng)Helium-S?
測試數(shù)據(jù):
調(diào)控界面各向異性性質(zhì)和DMI
低電流誘發(fā)的SOT轉(zhuǎn)換獲取
控制斯格明子和磁疇壁的動態(tài)變化
用戶單位 已經(jīng)購買該設(shè)備的國內(nèi)外用戶單位:
Beihang University (China)
Fudan University (China)
University of California San Diego (USA)
University of California Davis (USA)
New York University (USA)
Georgetown University (USA)
Northwestern University (USA)
University of Lorraine (France)
SPINTEC Grenoble (France)
University of Cambridge (UK)
University of Manchester (UK)
Nanyang Technological University (Singapore)
A*STAR (Singapore)
University of Gothenburg (Sweden)
Western Digital (USA)
IBM (USA)
Singulus Technologies (Germany)
文章列表:
[1]. Tailoring magnetism by light-ion irradiation, J Fassbender, D Ravelosona, Y Samson, Journal of Physics D: Applied Physics 37 (2004)
[2]. Ordering intermetallic alloys by ion irradiation: A way to tailor magnetic media, H Bernas & D Ravelosona, Physical review letters 91, 077203 (2003)
[3]. Influence of ion irradiation on switching field and switching field distribution in arrays of Co/Pd-based bit pattern media, T Hauet & D Ravelosona, Applied Physics Letters 98, 172506 (2011)
[4]. Ferromagnetic resonance study of Co/Pd/Co/Ni multilayers with perpendicular anisotropy irradiated with helium ions, J-M.Beaujour & A.D. Kent & D.Ravelosona &E.Fullerton, Journal of Applied Physics 109, 033917 (2011)
[5]. Irradiation-induced tailoring of the magnetism of CoFeB/MgO ultrathin films, T Devolder & D Ravelosona, Journal of Applied Physics 113, 203912 (2013)
[6]. Controlling magnetic domain wall motion in the creep regime in He-irradiated CoFeB/MgO films with perpendicular anisotropy, L.Herrera Diez & D.Ravelosona, Applied Physics Letter 107, 032401 (2015)
[7]. Measuring the Magnetic Moment Density in Patterned Ultrathin Ferromagnets with Submicrometer Resolution, T.Hingant & D.Ravelosona & V.Jacques, Physical Review Applied 4, 014003 (2015)
[8]. Suppression of all-optical switching in He+ irradiated Co/Pt multilayers: influence of the domain-wall energy, M El Hadri & S Mangin & D Ravelosona, J. Phys. D: Appl. Phys. 51, 215004 (2018)
[9]. Tuning the magnetodynamic properties of all-perpendicular spin valves using He+ irradiation, Sheng Jiang & D.Ravelosona & J.Akerman, AIP Advances 8, 065309 (2018)
[10]. Enhancement of the Dzyaloshinskii-Moriya Interaction and domain wall velocity through interface intermixing in Ta/CoFeB/MgO, L Herrera Diez & D Ravelosona, Physical Review B 99, 054431 (2019)
[11]. Enhancing domain wall velocity through interface intermixing in W-CoFeB-MgO films with perpendicular anisotropy, X Zhao & W.Zhao & D Ravelosona, Applied Physics Letter 115, 122404 (2019)
[12]. Controlling magnetism by interface engineering, L Herrera Diez & D Ravelosona, Book Magnetic Nano- and Microwires 2nd Edition, Elsevier (2020)
[13]. Reduced spin torque nano-oscillator linewidth using He+ irradiation, S Jiang & D Ravelosona & J Akerman, Appl. Phys. Lett. 116, 072403 (2020)
[14]. Spin–orbit torque driven multi-level switching in He+ irradiated W–CoFeB–MgO Hall bars with perpendicular anisotropy, X.Zhao & M.Klaui & W.Zhao & D.Ravelosona, Appl. Phys. Lett 116, 242401 (2020)
[15]. Magnetic field frustration of the metal-insulator transition in V2O3, J.Trastoy & D.Ravelosona & Y.Schuller, Physical Review B 101, 245109 (2020)
[16]. Tailoring interfacial effect in multilayers with Dzyaloshinskii–Moriya interaction by helium ion irradiation, A.Sud & D.Ravelosona &M.Cubukcu, Scientific report 11, 23626 (2021)
[17]. Ion irradiation and implantation modifications of magneto-ionically induced exchange bias in Gd/NiCoO, Christopher J. Jensen & Dafiné Ravelosona, Kai Liu, Journal of Magnetism and Magnetic Materials 540, 168479 (2021)
[18]. Helium Ions Put Magnetic Skyrmions on the Track, R.Juge & D.Ravelosona & O.Boulle, Nano Lett. 2021 Apr 14;21(7):2989-2996
參考文獻(xiàn):
[1]. Cristina Balan, Johannes W. van de Jagt, et al. Improving Néel Domain Walls Dynamics and Skyrmion Stability Using He Ion Irradiation. Small, 2023. https://doi.org/10.1002/smll.202302039
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